Multislice Electron Tomography Using Four-Dimensional Scanning Transmission Electron Microscopy

نویسندگان

چکیده

Electron tomography offers important three-dimensional (3D) structural information which cannot be observed by two-dimensional imaging. By combining annular dark field scanning transmission electron microscopy (ADF-STEM) with aberration correction, the resolution of has reached atomic resolution. However, based on ADF-STEM inherently suffers from several issues, including a high dose requirement, poor contrast for light elements, and artifacts image nonlinearity. Here, we developed new method called MultiSlice Tomography (MSET) 4D-STEM tilt series. Our simulations show that multislice-based 3D reconstruction can effectively reduce undesirable nonlinear contrast, allowing precise determination structures improved sensitivity low-Z at considerably low conditions. We expect MSET applied to wide variety materials, radiation-sensitive samples materials containing elements whose have never been fully elucidated due limitations or imaging contrast.

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ژورنال

عنوان ژورنال: Physical review applied

سال: 2023

ISSN: ['2331-7043', '2331-7019']

DOI: https://doi.org/10.1103/physrevapplied.19.054062